RHEED beam source 15 keV
This source offers exceptional performance in a very compact package. It is the perfect gun for typical deposition systems, providing a sharp and stable beam with intensity to spare. The 15 keV energy is sufficient for most applications, with very low parasitic x-ray levels that usually do not require any additional shielding measures.
Energy range | 5-15 keV |
Maximum beam current | 160 µA |
Beam spot size | <70µm |
Focus lens | electrostatic |
Deflections | magnetic x, y, beam rocking |
Beam blanking | yes |
Mounting flange | DN 40 CF |
Bakeout temperature | 200 °C |
Length | 242 mm |