RHEED beam source 15 keV

Photograph of RHEED electron source 15 keV

This source offers exceptional performance in a very compact package. It is the perfect gun for typical deposition systems, providing a sharp and stable beam with intensity to spare. The 15 keV energy is sufficient for most applications, with very low parasitic x-ray levels that usually do not require any additional shielding measures.

Technical data
Energy range 5-15 keV
Maximum beam current160 µA
Beam spot size <70µm
Focus lens electrostatic
Deflections magnetic x, y, beam rocking
Beam blanking yes
Mounting flange DN 40 CF
Bakeout temperature 200 °C
Length 242 mm